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KMap
Profile
Dale Hetherington
Professor of Practice | Member of the Graduate Faculty
Electrical and Computer Engr
Full Page
Overview
Research
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Collaboration
(8)
Janet Roveda
Mutual work: 1 Proposal
Collaboration Details
Ali Akoglu
Mutual work: 1 Proposal
Collaboration Details
Tosiron Adegbija
Mutual work: 1 Proposal
Collaboration Details
Farhang Shadman
Mutual work: 1 Publication
Collaboration Details
Ratchaneekorn Thamvichai
Mutual work: 1 Proposal
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Publications
(7)
Chart
Bar chart with 4 bars.
The chart has 1 X axis displaying Year.
The chart has 1 Y axis displaying values. Data ranges from 1 to 3.
Created with Highcharts 11.4.8
Year
1998
1999
2004
2005
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Recent
Dependence of Oxide Pattern Density Variation on Motor Current Endpoint Detection during Shallow Trench Isolation Chemical Mechanical Planarization
2005
Arrhenius Characterization of ILD and Copper CMP Processes
2004
Atomic force microscopy, lateral force microscopy, and transmission electron microscopy investigations and adhesion force measurements for elucidation of tungsten removal mechanisms
1999
Analysis of in-situ vibration monitoring for end-point detection of CMP planarization processes
1999
A three-dimensional silicon photonic crystal
1998
A three-dimensional photonic crystal operating at infrared wavelengths
1998
Applications of photonic crystals in optoelectronics
1998
Dale Hetherington | KMap Profile - Institutional Knowledge Map (KMap)
