Map Home
Type / to search with text or keywords
/
keyboard shortcut: Type "/" on your keyboard for a quick search
Search button
Loading...
Loading...
Scroll left
Grants
Citations
H-Index
Patents
News
Books
Scroll right
Collapse sidebar
Data issues & feedback
Adjust height of sidebar
KMap
People
Adjust height of sidebar
KMap
Profile
Dale Hetherington
Professor of Practice | Member of the Graduate Faculty
Electrical and Computer Engr
Full Page
Overview
Research
More
Collaboration
(6)
Ali Akoglu
Mutual work: 1 Proposal
Collaboration Details
Janet Roveda
Mutual work: 1 Proposal
Collaboration Details
Tosiron Adegbija
Mutual work: 1 Proposal
Collaboration Details
Farhang Shadman
Mutual work: 1 Publication
Collaboration Details
Ratchaneekorn Thamvichai
Mutual work: 1 Proposal
Collaboration Details
Page 1 of 2
Previous page
Next page
Publications
(7)
Recent
Dependence of Oxide Pattern Density Variation on Motor Current Endpoint Detection during Shallow Trench Isolation Chemical Mechanical Planarization
2005
Arrhenius Characterization of ILD and Copper CMP Processes
2004
Analysis of in-situ vibration monitoring for end-point detection of CMP planarization processes
1999
Atomic force microscopy, lateral force microscopy, and transmission electron microscopy investigations and adhesion force measurements for elucidation of tungsten removal mechanisms
1999
A three-dimensional photonic crystal operating at infrared wavelengths
1998
Applications of photonic crystals in optoelectronics
1998
A three-dimensional silicon photonic crystal
1998
