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Grant
Environmental, Safety & Health Properties of "Onium" Photoacid Generators and Their Photodegradation Products
Sponsored by Semiconductor Research Corporation
$403.6K Funding
3 People
External
Related Topics
semiconductor manufacturing,
environmental engineering,
center for research,
semiconductor materials,
sustainable manufacturing
People
Reyes Sierra Alvarez
Co-Investigator (COI)
Chemical & Environmental Engr
﹒Professor
Farhang Shadman
Key Personnel (KP)
Chemical & Environmental Engr
﹒Professor
Jon Chorover
Co-Investigator (COI)
Environmental Science-Res
﹒Associate Vice President for Research